Automatic Wet Bench System

Price Not Announced

Out of Stock

SKU: 216541984
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Chemical boxes intended for the production of semiconductor wafers up to 300 mm in diameter. Fully automatic transfer of wafers in the technological process. Automatic filling of etching basths. Resistivity  easurements in rinsing baths. Special baths for multiple processes in one tank.

Features and Benefits
 Fully robotic handling
 Multiple baths within one system
 User-friendly HMI interface

Configuration
 Touchscreen LCD display
 PLC controller
 PFA high purity pneumatic operated valve
 No metal contamination
 Standard 4-bath system

Optionals
 Computer network support
 SECSII/GEM support
 Various number of baths
 Special baths for multiple processes
 Measurements of resistivity

Weight500kg
Length200cm
Width200cm
Height120cm