Chemical Delivery System

Price Not Announced

Pump type
Barrel Capacity

System for automatic distribution of pure chemicals in semiconductor industry. Can be used for all types of chemicals used in semiconductor industry.

Features and Benefits

  • High capacity of chemicals
  • Multiple equipment supplying
  • Remote control & supervision
  • Savings on chemicals’ cost
  • Safe alternative to manual filling
  • Elimination of possible contamination
  • Reliable operation
  • User-friendly HMI interface


  • Touchscreen LCD display
  • up to 200 l barrel
  • PLC controller
  • PFA high purity pneumatic operated valve
  • No metal contamination
  • Up to 8 various equipment within one CDS


  • Computer network support
  • SECSII/GEM support
  • Various sizes and pump performance
  • SMS Notifications for empty barrels
  • Remote control by Android / iOS Smartphone

Product List EN: Download
Product List CN: Download


Levitronix Pump demonstration video

Pump type Levitronix Magnetic Pump, Membrane PFA Pump
Barrel Capacity 1000 l, 200 l, 500 l