FSI Titan Spray System

750.000 CZK

In Stock: 2 available

SKU: 299
Tagged as , , .

LIMITED QUANTITY IN STOCK FOR ONLY 19,999 USD

All-in-one high capacity wet processing equipment upgraded for demands of the 21st century.

Configuration
 PFA high purity pneumatic operated valve
 No metal contamination
 Four cassetes for 6“ wafers (100 wafers per run)

Optionals
 15“ Touchscreen LCD Display
 PLC controller
 In-line ultrapure DI water heater
 Canister console
 Recirculation tank for HF / BOE
 Chamber Temperature Measurement
 Computer network support
 SECSII/GEM support
 built-in ozone generator

Features and Benefits
 Reduced DI water consumption
 Savings of Chemicals
 Low effluent and Disposal Costs
 High Process Reliability
 Small Footprint
 Safe operation
 Reliable operation

Process availability
 B clean
 C clean
 RCA clean
 SC1 clean
 SC2 clean
 Oxide etch
 Ozone clean
 Piranha clean
 Rinse and Dry