FSI Titan Spray System

Description

LIMITED QUANTITY IN STOCK FOR ONLY 19,999 USD

All-in-one high capacity wet processing equipment upgraded for demands of the 21st century.

Configuration

• PFA high purity pneumatic operated valve
• No metal contamination
• Four cassetes for 6“ wafers (100 wafers per run)

Optionals

• 15“ Touchscreen LCD Display
• PLC controller
• In-line ultrapure DI water heater
• Canister console
• Recirculation tank for HF / BOE
• Chamber Temperature Measurement
• Computer network support
• SECSII/GEM support
• built-in ozone generator

Features and Benefits

• Reduced DI water consumption
• Savings of Chemicals
• Low effluent and Disposal Costs
• High Process Reliability
• Small Footprint
• Safe operation
• Reliable operation

Process availability

• B clean
• C clean
• RCA clean
• SC1 clean
• SC2 clean
• Oxide etch
• Ozone clean
• Piranha clean
• Rinse and Dry