Hybrid Hydrogen Ozone Water System

Description

Equipment HO3WG100/1 is used for the production of high purity DI water with controlled concentrations of dissolved hydrogen and ozone in the water. The device can be used in the production of semiconductors and displays for the cleaning of surfaces without the use of chemicals. This is a hybrid device that simultaneously produces both DI water with dissolved hydrogen and DI water with dissolved ozone. Each output line has a maximum flow rate of up to 100 liters per minute.

Features and Benefits

• hydrogen and Ozone in one equipment
• Eco-friendly alternative to chemicals
• Saves on chemicals and handling costs
• Small footprint
• High flowrate with high concentrations
• Touch panel HMI interface
• All-in-one solution for display production

Configuration

• Hollow fiber membrane contactors
• Hydrogen water unit 100 slpm @ 1ppm
• Ozone water unit 100 slpm @ 25 ppm
• PLC controller
• PFA high purity pneumatic operated valve
• Touchscreen LCD display
• No metal contamination

Optionals

• Various flowrates and concentrations
• Computer network support
• SECSII/GEM support

Download:

Product List EN
Product List CN

Additional Information

Weight	300kg
Length	70cm
Width	200cm
Height	70cm