Ozone Water System

Equipment O3WG100/1 is used for the production of high purity DI water with controlled
concentrations of dissolved ozone in the water. The device can be used in the production of
semiconductors and displays for the cleaning of surfaces without the use of chemicals.
Output line has a maximum flow rate of up to 100 liters per minute. We also offer dual units with
two separate independently controlled ozone water units for use with multiple equipment or
for reaching higher flowrates.

Features and Benefits

• Alternative for Sulphur Acid H2SO4
• Eco-friendly alternative to chemicals
• Saves on chemicals and handling costs
• Small footprint
• High flowrate with high concentrations
• Touch panel HMI interface
• All-in-one solution for display production

Configuration

• Hollow fiber membrane contactors
• Ozone water unit 100 slpm @ 25 ppm
• PLC controller
• PFA high purity pneumatic operated valve
• Touchscreen LCD display
• No metal contamination

Optionals

• Various flowrates and concentrations
• Standard flowrates 10/50/70/90/100 slpm
• Standard concentrations up to 50 ppm
• Computer network support
• SECSII/GEM support
• Dual unit

Additional Information

Weight	400kg
Length	82cm
Width	200cm
Height	82cm